Title :
Measurement system capability analysis
Author :
Potter, Randall W.
Author_Institution :
SEMATECH/AT&T, Austin, TX, USA
Abstract :
A procedure for carrying out a measurement system capability study is presented. The tool is first calibrated against a known standard. Then, the tool´s short-term repeatability is determined. A reproducibility evaluation is performed, stability is evaluated over time, and statistical process control is implemented. Key terminology in measurement capability studies is reviewed. Example formulas for a variance components analysis in the simple case where operators are the only source of variation are given
Keywords :
measurement standards; measurement systems; statistical process control; measurement system capability study; short-term repeatability; stability; standard; statistical process control; variance components analysis; Control systems; Current measurement; Measurement errors; Metrology; Personnel; Production systems; Semiconductor device manufacture; Statistical analysis; Testing; Time measurement;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111235
