DocumentCode :
2592208
Title :
Packaging for microengineered devices. Lessons from the real world
Author :
Beardmore, Geoff
fYear :
1997
fDate :
35487
Firstpage :
42401
Lastpage :
42408
Abstract :
This presentation reviews just a small selection of the lessons learned and experience gained in packaging small electro-mechanical devices and instruments, and suggests that many of these ideas could be relevant to the packaging and interconnection of future MEMS devices
fLanguage :
English
Publisher :
iet
Conference_Titel :
Assembly and Connections in Microsystems (Digest No. 1997/004), IEE Colloquium on
Conference_Location :
London
Type :
conf
DOI :
10.1049/ic:19970020
Filename :
597320
Link To Document :
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