Title :
Specific geometries of resonant cantilevers for scanning force microscopy
Author :
Rouzic, Julian Le ; Cretin, Bernard ; Vairac, Pascal ; Cavallier, Bruno
Author_Institution :
FEMTO-ST Inst., Besancon, France
Abstract :
In this paper, specific geometries of resonant cantilevers for scanning force microscopy aimed to reduce sliding between tip and sample have been presented. These cantilevers have been designed for the scanning microdeformation microscope. Flexural and torsional vibration modes have been observed and compared to finite element simulations. Static deflections and dynamic sliding have been studied and the results have confirmed the efficiency of the cantilevers to keep the tip vertical during contact and to reduce the displacement of the tip on the surface.
Keywords :
atomic force microscopy; cantilevers; finite element analysis; microscopes; slip; dynamic sliding; finite element simulations; flexural vibration modes; microdeformation microscope scanning; resonant cantilevers; scanning force microscopy; static deflections; torsional vibration modes; Atomic force microscopy; Finite element methods; Force control; Force sensors; Geometry; Micromechanical devices; Nanometers; Piezoelectric transducers; Resonance; Resonant frequency;
Conference_Titel :
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location :
Besancon
Print_ISBN :
978-1-4244-3511-1
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2009.5168301
