Specific geometries of resonant cantilevers for scanning force microscopy

Author

Rouzic, Julian Le ; Cretin, Bernard ; Vairac, Pascal ; Cavallier, Bruno

Author_Institution

FEMTO-ST Inst., Besancon, France

fYear

2009

fDate

20-24 April 2009

Firstpage

822

Lastpage

825

Abstract

In this paper, specific geometries of resonant cantilevers for scanning force microscopy aimed to reduce sliding between tip and sample have been presented. These cantilevers have been designed for the scanning microdeformation microscope. Flexural and torsional vibration modes have been observed and compared to finite element simulations. Static deflections and dynamic sliding have been studied and the results have confirmed the efficiency of the cantilevers to keep the tip vertical during contact and to reduce the displacement of the tip on the surface.

Keywords

atomic force microscopy; cantilevers; finite element analysis; microscopes; slip; dynamic sliding; finite element simulations; flexural vibration modes; microdeformation microscope scanning; resonant cantilevers; scanning force microscopy; static deflections; torsional vibration modes; Atomic force microscopy; Finite element methods; Force control; Force sensors; Geometry; Micromechanical devices; Nanometers; Piezoelectric transducers; Resonance; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International

Conference_Location

Besancon

ISSN

1075-6787

Print_ISBN

978-1-4244-3511-1

Electronic_ISBN

1075-6787

Type

conf

DOI

10.1109/FREQ.2009.5168301

Filename

5168301