DocumentCode :
2593101
Title :
Polymer microfabrication applied to assembly and connection problems
Author :
Ryan, T.G.
Author_Institution :
Epigem Ltd., Middlesbrough, UK
fYear :
1997
fDate :
35487
Firstpage :
42491
Lastpage :
42492
Abstract :
This paper will describe the wide range of polymer microfabrication techniques that are now available not only for moulding channels (and surface reliefs in general) but also for filling the reliefs with the range of materials required to produce microsystems. Examples will be described in which a polymer surface relief has been used to provide an application function, for example, a diffraction grating or a channel waveguide and where the the problems of optical interconnection and assembly have been addressed
Keywords :
optical polymers; channel waveguide; diffraction grating; microsystem; moulding; optical assembly; optical interconnection; polymer microfabrication; surface relief;
fLanguage :
English
Publisher :
iet
Conference_Titel :
Assembly and Connections in Microsystems (Digest No. 1997/004), IEE Colloquium on
Conference_Location :
London
Type :
conf
DOI :
10.1049/ic:19970023
Filename :
597325
Link To Document :
بازگشت