RF planar ion trap for chemical sensing

Summary form only given, as follows. RF ion traps are a principle means for molecule separation used in mass spectrometry based chemical sensors. The miniaturization of the electric field based ion trap leads to lower voltage and power requirements for handheld mass spectrometers. This paper demonstrates a new RF ion trap design capable of being fabricated through planar techniques amenable to MEMS and system-in-package integration. Furthermore, it has the trapping capacity and trapping efficiency of a 2D rectilinear ion trap.