Title :
A Reactive Ion Milling Process For Patterning Narrow Track Iron Nitride Recording Head Poles At The Wafer Level
Author :
Jayasekara, W.P. ; Grant, J. ; Bain, J.A. ; Kryder, M.H.
Author_Institution :
Carnegie Mellon University
Keywords :
Acceleration; Argon; Geometry; Iron; Magnetic heads; Magnetic recording; Milling; Resists; Titanium; Voltage;
Conference_Titel :
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-3862-6
DOI :
10.1109/INTMAG.1997.597331
