A Reactive Ion Milling Process For Patterning Narrow Track Iron Nitride Recording Head Poles At The Wafer Level

Author

Jayasekara, W.P. ; Grant, J. ; Bain, J.A. ; Kryder, M.H.

Author_Institution

Carnegie Mellon University

fYear

1997

fDate

1-4 April 1997

Keywords

Acceleration; Argon; Geometry; Iron; Magnetic heads; Magnetic recording; Milling; Resists; Titanium; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International

Conference_Location

New Orleans, LA, USA

Print_ISBN

0-7803-3862-6

Type

DOI

10.1109/INTMAG.1997.597331

Filename

597331

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