Power handling and intermodulation distortion of contour-mode AlN MEMS resonators and filters

Summary form only given, as follows. We report the power handling and intermodulation distortion of piezoelectric contour mode resonators and filters. The output power handling of the resonator and filter scales with the inverse of the impedance squared and the number of resonators, while the third-order intercept depends on the tone spacing. 50 Ω AlN resonators demonstrate output power capability of +10 dBm and OIP3 +20 dBm, while an eight resonator filter demonstrates output P1dB of +14 dBm and a OIP3 +32 dBm.