DocumentCode
2596665
Title
Ion Implanted W-Band Monolithic Balanced Mixers for Broadband Applications
Author
Trinh, T.N. ; Wong, W.S. ; Li, D. ; Kessler, J.R.
Volume
87
Issue
1
fYear
1987
fDate
31929
Firstpage
89
Lastpage
92
Abstract
An all ion-implanted monolithic broadband balanced mixer fabricated on a GaAs substrate for operation at W-band frequencies is described. A deep implanted buried n+ layer was used to minimize the diode series resistance. Ohmic contacts were formed by standard alloying of planar eutectic AuGe metallization into the n+ layer. The mixer diode structure is completely compatible with GaAs MESFET-based monolithic integrated circuit processing techniques. A conversion loss from 6.8 to 10 dB has been measured over an RF range of 75 to 88 GHz, with a LO drive of 10 dBm at 92 GHz.
Keywords
Alloying; Diodes; Electrical resistance measurement; Frequency; Gallium arsenide; MESFET integrated circuits; Metallization; Mixers; Monolithic integrated circuits; Ohmic contacts;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Millimeter-Wave Monolithic Circuits
Type
conf
DOI
10.1109/MCS.1987.1114522
Filename
1114522
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