Title :
Optical and Glow Diagnostics of 13.56-MHz RF Plasma-PVDF Membrane Surface Interactions
Author :
Chun Huang ; Ching-Yuan Tsai ; Wei-Chun Ma ; Kuan-Ying Lai
Author_Institution :
Dept. of Chem. Eng. & Mater. Sci., Yuan Ze Univ., Chungli, Taiwan
Abstract :
The glow characteristics and optical emission features of 13.56-MHz radio frequency (RF) argon plasmapoly(vinylidene fluoride) membrane surface interactions were studied. The glow of RF plasma surface modification was characterized by optical photography and optical emission spectroscopy. The glow differences were attributed to the nature of the luminous gas phase in respect to chemically reactive species.
Keywords :
argon; glow discharges; high-frequency discharges; membranes; plasma diagnostics; plasma materials processing; plasma-wall interactions; polymers; 13.56-MHz RF plasma-PVDF membrane surface interactions; 13.56-MHz radio frequency argon plasma-poly(vinylidene fluoride) membrane surface interactions; Ar; chemically reactive species; frequency 13.56 MHz; glow characteristics; glow diagnostics; luminous gas phase; optical diagnostics; optical emission spectroscopy; optical photography; Argon; Chemicals; Plasmas; Polymers; Radio frequency; Stimulated emission; Surface treatment; Plasma Applications Surface; Plasma Applications Surface.;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2323996
