DocumentCode
2596863
Title
Numerical Solution Of Diffusion Equations On Time-variant Domains
Author
Paffrath, M. ; Steger, K.
Author_Institution
SIEMENS AG
fYear
1990
fDate
3-4 Jun 1990
Firstpage
11
Lastpage
12
Keywords
Computational modeling; Differential equations; Doping profiles; Grid computing; Mesh generation; Oxidation; Research and development; Semiconductor process modeling; Shape; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
Type
conf
DOI
10.1109/NUPAD.1990.748252
Filename
748252
Link To Document