• DocumentCode
    2596876
  • Title

    Rta-simulations With the 2-d Process Simulator Promis

  • Author

    Hobler, G. ; Halania, S. ; Wimmer, K. ; Selberherr, S. ; Pötzl, H.

  • Author_Institution
    Technical University of Vienna
  • fYear
    1990
  • fDate
    3-4 Jun 1990
  • Firstpage
    13
  • Lastpage
    14
  • Keywords
    Diffusion processes; Ion implantation; Jitter; Kinetic theory; Monte Carlo methods; Production; Rapid thermal annealing; Rapid thermal processing; Simulated annealing; Trajectory;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
  • Type

    conf

  • DOI
    10.1109/NUPAD.1990.748253
  • Filename
    748253
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2596876