DocumentCode :
2597032
Title :
Morphology and microstructure of carbon nanotubes grown by hot filament chemical vapor deposition
Author :
Yung, K.P. ; Wei, J. ; Tay, B.K.
Author_Institution :
Singapore Inst. of Manuf. Technol., Singapore
fYear :
2004
fDate :
8-10 Dec. 2004
Firstpage :
138
Lastpage :
142
Abstract :
In this study, carbon nanotubes growth on Ni foil using hot filament chemical vapor deposition is reported. The effects of C2H2 concentration, deposition time, temperature and working pressure on CNTs growth were investigated. The morphology and microstructure of the films were measured and analyzed by scanning electron microscope and the graphitized structures were confirmed by Raman spectra. Deposition temperature followed by deposition time had the most significant effect on carbon nanotube length. An increase in film thickness suffered from reducing density in the case of increased C2H2 concentration, deposition time and deposition temperature. Higher working pressure led to the growth of denser and longer nanotubes.
Keywords :
Raman spectra; carbon nanotubes; chemical vapour deposition; electric field effects; epitaxial growth; films; foils; nickel; organic compounds; scanning electron microscopes; C2H2; Ni; Ni foil; Raman spectra; carbon nanotubes; deposition temperature; deposition time; film microstructure; film morphology; film thickness; hot filament chemical vapor deposition; scanning electron microscope graphitized structures; Carbon nanotubes; Chemical analysis; Chemical lasers; Chemical technology; Chemical vapor deposition; Microstructure; Morphology; Scanning electron microscopy; Spectroscopy; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Packaging Technology Conference, 2004. EPTC 2004. Proceedings of 6th
Print_ISBN :
0-7803-8821-6
Type :
conf
DOI :
10.1109/EPTC.2004.1396592
Filename :
1396592
Link To Document :
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