DocumentCode
2597109
Title
A Comprehensive Model Of Inversion Layer Hole Mobility For Simulation Of Submicron Mosfets
Author
Agostinelli, V.M. ; Shin, H. ; Tasch, A.F.
Author_Institution
The University of Texas-Austin
fYear
1990
fDate
3-4 Jun 1990
Firstpage
39
Lastpage
40
Keywords
Charge carrier processes; Doping; Equations; MOSFETs; Particle scattering; Phonons; Rough surfaces; Semiconductor process modeling; Surface roughness; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
Type
conf
DOI
10.1109/NUPAD.1990.748266
Filename
748266
Link To Document