A novel method for fabrication of integrated shadow mask for patterning electrode in passive matrix OLED displays

This paper reports a novel method for making an integrated shadow mask used in fabrication of passive matrix OLED displays. Common positive and negative photoresists were employed to produce retrograded strip pillars with large overhang and undercut by photolithography. The pillar strips serve as an effective shadow mask for patterning the organic layers and the metal cathodes in OLED display devices. It is expected that this method can significantly enhance the performance of passive matrix OLED at a low shadow mask fabrication cost. The method can be used for fabricating more complicated structures for other display applications.