Title :
The Intertool Profile Interchange Format
Author :
Wong, Alexander S. ; Boning, Duane S. ; Heytens, Michael L. ; Neureuther, Andrew R.
Author_Institution :
Massachusetts Institute of Technology
Keywords :
CADCAM; Computer aided manufacturing; Computer integrated manufacturing; Design automation; Geometry; Laboratories; Object oriented modeling; Spatial databases; Standards development; Visual databases;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748277
