Low temperature assembly method of microfluidic bio-molecules detection device

Author

van Loo, S. ; Stoukatch, S. ; Axisa, F. ; Destiné, J. ; Van Overstraeten-Schlögel, N. ; Flandre, D. ; Lefèvre, O. ; Mertens, P.

Author_Institution

EMMI/Microsys, Univ. de Liege, Liege, Belgium

fYear

2012

fDate

22-23 May 2012

Firstpage

181

Lastpage

184

Abstract

We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation.

Keywords

biosensors; capacitive sensors; cryogenic electronics; elemental semiconductors; microfluidics; molecular biophysics; semiconductor device packaging; silicon; Si; biofunctionalized interdigitated capacitive sensor; biological material; biomolecules detection; low temperature assembly method; low temperature packaging; microfluidic channel; microfluidic device; microsystem; photo-patternable resist; plastic cover; sensor assembly; Assembly; Bonding; Microfluidics; Silicon; Temperature sensors; Wires; bio-packaging; biocompatibility; low temperature assembly; microfluidics;

fLanguage

English

Publisher

ieee

Conference_Titel

Low Temperature Bonding for 3D Integration (LTB-3D), 2012 3rd IEEE International Workshop on

Conference_Location

Tokyo

Print_ISBN

978-1-4673-0743-7

Type

conf

DOI

10.1109/LTB-3D.2012.6238086

Filename

6238086