The INMOS integrated parametric test and analysis system

A distributed software package which simplifies the automation of parametric test program generation and data analysis is described. This parametric test and analysis system is designed to standardize parametric testing, hardware, and controlling software and thereby reduce test program development time. It is designed primarily for the test engineer whose responsibilities include the specification of tests and evaluation of data collected on semiconductor devices. It can also assist process engineers with the development of new parametric programs. It is used in a fabrication facility where engineering evaluation and characterization of test pattern data are used for the purpose of process control and for design feedback.