An expert system for process diagnosis (MOS product testing)

Author

Hamilton, Andrew ; Schofield, Richard

Author_Institution

INMOS Ltd., Newport, UK

fYear

1989

fDate

13-14 March 1989

Firstpage

55

Lastpage

57

Abstract

At INMOS, wafer parametric data for all MOS products are produced using a Keithley parametric test system and stored in a VAX database. A VAX program accesses this database and identifies parametric data to be analyzed. This information is used by another VAX program to run the process diagnosis software on the data. A description of the diagnosis program is given. The system is economical in terms of computer resources, requiring roughly one CPU-minute for the analysis and diagnosis of a zero-yield wafer, and can be run as a low-priority batch job during off-peak periods. Manual input to the system is limited to two components, namely, the regular probing of zero-yield product, and the updating of diagnosis tables when a new failure mechanism is identified.

Keywords

MOS integrated circuits; automatic testing; electronic engineering computing; expert systems; integrated circuit testing; INMOS; Keithley parametric test system; MOS products; VAX database; expert system; failure mechanism; low-priority batch job; process diagnosis; wafer parametric data; zero-yield wafer; Data analysis; Data mining; Databases; Diagnostic expert systems; Fabrication; Integrated circuit yield; Manufacturing; Measurement standards; Probes; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 1989. ICMTS 1989. Proceedings of the 1989 International Conference on

Print_ISBN

0-87942-714-0

Type

conf

DOI

10.1109/ICMTS.1989.39281

Filename

39281