Design of a new MEMS DC/DC voltage step-down converter

This paper presents a new MEMS approach to dc voltage step-up and step-down conversion using a variable capacitor. The conversion principle is described through the operation of a DC-DC voltage step down converter based on the actuation of a variable capacitor using the converter input and output voltages. The effect of the variable capacitor design parameters on the converter efficiency has been analyzed in order to deduce the optimal design for a prototype implementation. The advantage of this converter is that it can be integrated on silicon while keeping a high efficiency because of zero switching control.