Title :
Applicatiorn of the Electron Microprobe Analyzer to the Study of Silicon Switching Diodes
Author :
Pietrokowsky, Paul
Author_Institution :
North American Aviation, Inc., Autonetics, Anaheim, California
Keywords :
Atomic measurements; Electron beams; Instruments; Particle scattering; Physics; Semiconductor diodes; Semiconductor impurities; Silicon; Solid state circuits; X-ray scattering;
Conference_Titel :
Physics of Failure in Electronics, 1963. Second Annual Symposium on the
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/IRPS.1963.362249