Title :
Silicon Surface Passivation: Materials and Micro Properties
Author :
Dzimianski, J.W. ; Pemsel, E.R. ; Lytle, W.J. ; Skinner, S.M.
Author_Institution :
Air Arm Division, Westinghouse Electric Company, Baltimore, Maryland
Keywords :
Crystallization; Electrons; Etching; Hafnium; Passivation; Probes; Semiconductor device packaging; Silicon compounds; Surface cleaning; Surface contamination;
Conference_Titel :
Physics of Failure in Electronics, 1963. Second Annual Symposium on the
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/IRPS.1963.362260
