DocumentCode

2598369

Title

Stacking Faults and Failure of Silicon Devices

Author

Queisser, H.J.

Author_Institution

Shockley Laboratory of Cleavite Transistor, Palo Alto, California

fYear

1963

fDate

Sept. 1963

Firstpage

476

Lastpage

482

Keywords

Etching; Fault diagnosis; Laboratories; Lattices; Physics; Production; Semiconductor materials; Silicon devices; Stacking; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics of Failure in Electronics, 1963. Second Annual Symposium on the

Conference_Location

Chicago, IL, USA

ISSN

0097-2088

Type

conf

DOI

10.1109/IRPS.1963.362262

Filename

4207613