Title :
Stacking Faults and Failure of Silicon Devices
Author_Institution :
Shockley Laboratory of Cleavite Transistor, Palo Alto, California
Keywords :
Etching; Fault diagnosis; Laboratories; Lattices; Physics; Production; Semiconductor materials; Silicon devices; Stacking; Substrates;
Conference_Titel :
Physics of Failure in Electronics, 1963. Second Annual Symposium on the
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/IRPS.1963.362262
