DocumentCode
2598672
Title
Coaxial probe dielectric measurements in the presence of airgaps
Author
Popov, Alexander P. ; Rotaru, Mihai Dragos
Author_Institution
Inst. of Microelectron., Singapore, Singapore
fYear
2004
fDate
8-10 Dec. 2004
Firstpage
496
Lastpage
498
Abstract
Interpolation formulas for retrieval of the dielectric constant of the substrate from the measured probe impedance within a specified frequency range are introduced. The proposed formulas were tested for retrieval of dielectric constant from impedance measurements for the substrates with known properties. It was found that the accuracy of the proposed interpolation formulas is better than 5% within the frequency range of 0.5-20 GHz.
Keywords
air gaps; dielectric measurement; electric impedance measurement; interpolation; permittivity; probes; substrates; 0.5 to 20 GHz; airgaps; coaxial probe dielectric measurement; dielectric constant retrieval; impedance measurements; interpolation formulas; probe impedance; Coaxial components; Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Frequency measurement; Impedance measurement; Interpolation; Probes; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Packaging Technology Conference, 2004. EPTC 2004. Proceedings of 6th
Print_ISBN
0-7803-8821-6
Type
conf
DOI
10.1109/EPTC.2004.1396658
Filename
1396658
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