Title :
Coaxial probe dielectric measurements in the presence of airgaps
Author :
Popov, Alexander P. ; Rotaru, Mihai Dragos
Author_Institution :
Inst. of Microelectron., Singapore, Singapore
Abstract :
Interpolation formulas for retrieval of the dielectric constant of the substrate from the measured probe impedance within a specified frequency range are introduced. The proposed formulas were tested for retrieval of dielectric constant from impedance measurements for the substrates with known properties. It was found that the accuracy of the proposed interpolation formulas is better than 5% within the frequency range of 0.5-20 GHz.
Keywords :
air gaps; dielectric measurement; electric impedance measurement; interpolation; permittivity; probes; substrates; 0.5 to 20 GHz; airgaps; coaxial probe dielectric measurement; dielectric constant retrieval; impedance measurements; interpolation formulas; probe impedance; Coaxial components; Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Frequency measurement; Impedance measurement; Interpolation; Probes; Testing;
Conference_Titel :
Electronics Packaging Technology Conference, 2004. EPTC 2004. Proceedings of 6th
Print_ISBN :
0-7803-8821-6
DOI :
10.1109/EPTC.2004.1396658
