A monolithic RF-MEMS filter with continuously-tunable center-frequency and bandwidth

Author

Hsu, Hao-Han ; Margomenos, Alexandros D. ; Peroulis, Dimitrios

Author_Institution

Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN, USA

fYear

2011

fDate

17-19 Jan. 2011

Firstpage

169

Lastpage

172

Abstract

A novel RF-MEMS structure to achieve tunable bandwidth is presented in this paper. A movable nickel electrode is employed to realize tunable broad-side coupling. The bottom electrode is fabricated with high resistivity-SiCr to avoid performance degradation. This tunable coupling section is implemented in a planar MEMS tunable filter that consists of λ/2 coplanar waveguide (CPW) resonators and nickel RF-MEMS varactors. The center frequency is tuned from 28.55 GHz to 27.22 GHz. The tuning range of the bandwidth is up to 5%. Simultaneous and continuous tuning of both center frequency and bandwidth is experimentally demonstrated.

Keywords

band-pass filters; coplanar waveguides; continuously-tunable center-frequency; coplanar waveguide resonators; frequency 27.22 GHz; frequency 28.55 GHz; monolithic RF-MEMS filter; movable nickel electrode; planar MEMS tunable filter; tunable broad-side coupling; Bandwidth; Couplings; Electrodes; Nickel; Optical resonators; Resonant frequency; Varactors; Bandwidth tuning; RF MEMS; nickel; tunable filters; tunable resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Silicon Monolithic Integrated Circuits in RF Systems (SiRF), 2011 IEEE 11th Topical Meeting on

Conference_Location

Phoenix, AZ

Print_ISBN

978-1-4244-8060-9

Type

conf

DOI

10.1109/SIRF.2011.5719344

Filename

5719344