A pull VPLs based release policy and dispatching rule for semiconductor wafer fabrication

Author

Li, You ; Jiang, Zhibin ; Jia, Wenyou

Author_Institution

Dept. of Ind. Eng. & Logistics Manage., Shanghai Jiao Tong Univ. (SJTU), Shanghai, China

fYear

2012

fDate

20-24 Aug. 2012

Firstpage

396

Lastpage

400

Abstract

In this paper, we present a pull VPLs based release policy and dispatching rule for semiconductor wafer fabrication. Based on the virtual production lines (VPLs), production time and WIP are allocated for each process step by products. Then a pull release policy and dispatching rule is proposed to control each VPL. We generate a SWFS case from a real-life wafer fab to evaluate the performances of the proposed methodology. Results of the numerical experiments show that the proposed methodology is effective in solving multi-objective scheduling problems for semiconductor wafer fabrication system (SWFS).

Keywords

dispatching; production engineering computing; scheduling; semiconductor industry; SWFS; SWFS case; WIP; dispatching rule; multiobjective scheduling problems; numerical experiments; production time; pull VPL based release policy; real-life wafer fab; semiconductor wafer fabrication system; virtual production lines; Dispatching; Fabrication; Job shop scheduling; Throughput; Workstations; dispatching; pull; release; semiconductor wafer fabrication system (SWFS); virtual production lines (VPLs);

fLanguage

English

Publisher

ieee

Conference_Titel

Automation Science and Engineering (CASE), 2012 IEEE International Conference on

Conference_Location

Seoul

ISSN

2161-8070

Print_ISBN

978-1-4673-0429-0

Type

conf

DOI

10.1109/CoASE.2012.6386320

Filename

6386320