DocumentCode :
2600568
Title :
Advances in silicon photonics
Author :
Liu, A.
fYear :
2004
fDate :
4-6 Oct. 2004
Firstpage :
7
Abstract :
Silicon photonics based on silicon-on-insulator (SOI) has recently attracted a great deal of attention since it offers an opportunity for low cost solutions for various applications ranging from telecommunications to chip-to-chip interconnects. As single crystal silicon exhibits no linear electro-optic effect, design and fabrication of a high-speed silicon optical modulator with bandwidth exceeding 1 GHz are very challenging. In this presentation we will review the recent demonstration of a fast (GHz) silicon optical modulator based on a metal-oxide-semiconductor (MOS) capacitor. We will present the device design, fabrication, and characterization. We will also discuss the modulation bandwidth and phase efficiency scaling for higher speed applications. Finally, we will give an overview of recent development in other silicon photonics related topics and challenges.
Keywords :
MOS capacitors; electro-optical effects; electro-optical modulation; elemental semiconductors; high-speed optical techniques; optical design techniques; optical fabrication; optical materials; semiconductor devices; silicon; silicon-on-insulator; Si; chip-to-chip interconnects; device characterization; device design; device fabrication; electro-optic effect; high-speed silicon modulator; higher speed applications; metal-oxide-semiconductor capacitor; modulation bandwidth; optical modulator; phase efficiency scaling; silicon photonics; silicon-on-insulator; single crystal silicon; telecommunications; Bandwidth; Costs; Electrooptic modulators; High speed optical techniques; Optical design; Optical device fabrication; Optical interconnections; Optical modulation; Photonic crystals; Silicon on insulator technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Photonics, 2004. MWP'04. 2004 IEEE International Topical Meeting on
Print_ISBN :
0-7803-8491-1
Type :
conf
DOI :
10.1109/MWP.2004.1396821
Filename :
1396821
Link To Document :
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