DocumentCode
2600712
Title
Three Dimensional Integrated Circuits: Epitaxial Lift Off GaAs Photodetectors Integrated Directly On Top Of Silicon Circuits
Author
Camperi-Ginestet, C. ; Kim, Y.W. ; Jokerst, N.M. ; Allen, M.G. ; Brooke, M.A.
Author_Institution
Georgia Institute of Technology
fYear
1992
fDate
July 29 1992-Aug. 12 1992
Keywords
Circuit testing; Etching; Gallium arsenide; Gold; Integrated circuit interconnections; Optical arrays; Photodetectors; Polyimides; Silicon; Thin film devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, Smart Pixels, LEOS 1992 Summer Topical Meeting Digest on
Conference_Location
Santa Barbara, CA, USA
Type
conf
DOI
10.1109/LEOSST.1992.697487
Filename
697487
Link To Document