DocumentCode :
2601014
Title :
Electron Microprobe Techniques for Failure Analysis of Silicon Planar Devices
Author :
Cline, James E. ; Schwartz, Seymour
Author_Institution :
Failure Mechanisms Branch, Qualifications and Standards Laboratory, Electronic Components Research; Electronics Research Center, National Aeronautics and Space Administration, Cambridge, Massachusetts
fYear :
1967
fDate :
Nov. 1967
Firstpage :
193
Lastpage :
200
Keywords :
Aluminum; Character generation; Chemical analysis; Electron emission; Failure analysis; Gold; Integrated circuit metallization; Laboratories; Qualifications; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1967. Sixth Annual
Conference_Location :
Los Angeles, CA, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1967.362412
Filename :
4207775
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2601014
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