DocumentCode

2602311

Title

A Mechanism of Evaluation in MAOS Systems

Author

Jund, C. ; Kervella, B. ; Grosvalet, J.

Author_Institution

SESCOSEM-Domaine de Corbeville, 91 - ORSAY

fYear

1971

fDate

25993

Firstpage

9

Lastpage

15

Keywords

Capacitors; Channel bank filters; Etching; Hydrogen; Mercury (metals); Probes; Silicon; Stress measurement; Thickness measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1971. 9th Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

conf

DOI

10.1109/IRPS.1971.362484

Filename

4207853