Title :
A Mechanism of Evaluation in MAOS Systems
Author :
Jund, C. ; Kervella, B. ; Grosvalet, J.
Author_Institution :
SESCOSEM-Domaine de Corbeville, 91 - ORSAY
Keywords :
Capacitors; Channel bank filters; Etching; Hydrogen; Mercury (metals); Probes; Silicon; Stress measurement; Thickness measurement; Voltage;
Conference_Titel :
Reliability Physics Symposium, 1971. 9th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1971.362484
