DocumentCode :
2602464
Title :
Reliability of A12O3-SiO2 IGFET Integrated Circuits
Author :
Cheney, G.T. ; Freyman, R.L. ; Mammele, A.A.
Author_Institution :
Bell Telephone Laboratories, Inc., 555 Union Boulevard, Allentown, Pennsylvania 18103
fYear :
1971
fDate :
25993
Firstpage :
62
Lastpage :
66
Keywords :
Clocks; Dielectric devices; Dielectric substrates; Encapsulation; Integrated circuit reliability; Jacobian matrices; Metallization; Palladium; Stress; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1971. 9th Annual
Conference_Location :
Las Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1971.362493
Filename :
4207862
Link To Document :
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