Title :
Reliability of A12O3-SiO2 IGFET Integrated Circuits
Author :
Cheney, G.T. ; Freyman, R.L. ; Mammele, A.A.
Author_Institution :
Bell Telephone Laboratories, Inc., 555 Union Boulevard, Allentown, Pennsylvania 18103
Keywords :
Clocks; Dielectric devices; Dielectric substrates; Encapsulation; Integrated circuit reliability; Jacobian matrices; Metallization; Palladium; Stress; Switches;
Conference_Titel :
Reliability Physics Symposium, 1971. 9th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1971.362493