Title :
Fabrication and Characterization of Carbon Nanotube Interconnects
Author :
Close, Gael F. ; Wong, H. S Philip
Author_Institution :
Stanford Univ., Stanford
Abstract :
We have fabricated arrays of individual metallic multi-wall carbon nanotube interconnects. We have also collected about two hundred resistance measurements to compare four different contact metals: Al, Au, Ti and Pd. Au and Pd contacts gave the lowest resistance. To validate the concept of high-speed carbon nanotube (CNT) interconnect, we have extended our electrical measurements of individual multi-wall carbon nanotubes (MWCNTs) into the radio-frequency regime up to 15 GHz. We also discuss the reasons why the conductivity of commercial MWCNTs is not yet competitive with copper.
Keywords :
carbon nanotubes; electric resistance measurement; integrated circuit interconnections; C; carbon nanotube interconnects; contact metals; electrical measurements; high-speed CNT interconnects; metallic multiwall carbon nanotube; resistance measurements; Carbon nanotubes; Conductivity; Contact resistance; Copper; Electric resistance; Electric variables measurement; Electrical resistance measurement; Fabrication; Gold; Radio frequency;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418902
