Title :
Integrated Circuits & Manufacturing - Advanced CMOS Logic and SoC Platforms
Author :
Cheek, Jon ; Pellerin, John
Author_Institution :
Freescale Semiconductor
Keywords :
CMOS integrated circuits; CMOS logic circuits; CMOS technology; High K dielectric materials; Integrated circuit manufacture; Integrated circuit technology; Logic devices; Paper technology; Random access memory; Semiconductor device manufacture;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418912
