Title :
CMOS Devices - High-Performance Devices
Author :
Natarajan, Sanjay ; Steegen, An
Author_Institution :
Intel Corporation
Keywords :
Annealing; CMOS technology; Dielectrics; Electrodes; FETs; Hafnium; National electric code; Paper technology; Surface-mount technology; Surfaces;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418920
