• DocumentCode
    2602973
  • Title

    A Laser Scanner for Integrated Circuit Testing

  • Author

    McMahon, Robert E.

  • Author_Institution
    Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
  • fYear
    1972
  • fDate
    26390
  • Firstpage
    23
  • Lastpage
    25
  • Keywords
    Circuit testing; Integrated circuit measurements; Integrated circuit testing; Integrated optics; Laser beams; Optical sensors; Photonic integrated circuits; Power lasers; Resistors; Semiconductor lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1972. 10th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1972.362524
  • Filename
    4207896
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2602973