DocumentCode :
2602973
Title :
A Laser Scanner for Integrated Circuit Testing
Author :
McMahon, Robert E.
Author_Institution :
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
fYear :
1972
fDate :
26390
Firstpage :
23
Lastpage :
25
Keywords :
Circuit testing; Integrated circuit measurements; Integrated circuit testing; Integrated optics; Laser beams; Optical sensors; Photonic integrated circuits; Power lasers; Resistors; Semiconductor lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1972. 10th Annual
Conference_Location :
Las Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1972.362524
Filename :
4207896
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2602973
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