Title :
A SEM Surface Voltage Measurement Technique
Author :
Beaulieu, R.P. ; Cox, C.D. ; Black, T.M.
Author_Institution :
Communications Research Centre, Box 490, Station A, Ottawa, Ontario, K1N 8T5
Abstract :
A plug in module has been developed for the measurement of surface voltages of semiconductor devices in a standard S.E.M. The secondary electrons produced by the S.E.M. electron beam are removed by a normal field and collected in a modified Everhart-Thornley detector. The design of the apparatus allows complete top access to the device. The detector output vs. surface voltage is essentially linear over a ¿10 to +10 volt range.
Keywords :
Communication standards; Detectors; Dielectrics and electrical insulation; Electron beams; Energy measurement; Plugs; Semiconductor devices; Surface charging; Surface topography; Voltage measurement;
Conference_Titel :
Reliability Physics Symposium, 1972. 10th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1972.362526
