• DocumentCode
    2603004
  • Title

    A SEM Surface Voltage Measurement Technique

  • Author

    Beaulieu, R.P. ; Cox, C.D. ; Black, T.M.

  • Author_Institution
    Communications Research Centre, Box 490, Station A, Ottawa, Ontario, K1N 8T5
  • fYear
    1972
  • fDate
    26390
  • Firstpage
    32
  • Lastpage
    35
  • Abstract
    A plug in module has been developed for the measurement of surface voltages of semiconductor devices in a standard S.E.M. The secondary electrons produced by the S.E.M. electron beam are removed by a normal field and collected in a modified Everhart-Thornley detector. The design of the apparatus allows complete top access to the device. The detector output vs. surface voltage is essentially linear over a ¿10 to +10 volt range.
  • Keywords
    Communication standards; Detectors; Dielectrics and electrical insulation; Electron beams; Energy measurement; Plugs; Semiconductor devices; Surface charging; Surface topography; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1972. 10th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1972.362526
  • Filename
    4207898
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2603004