Title :
Analysis of defective patterns on wafers in semiconductor manufacturing: A bibliographical review
Author :
Yum, Bong-Jin ; Koo, Jae Hoon ; Kim, Seong-Jun
Author_Institution :
Dept. of Ind. & Syst. Eng., KAIST, Daejeon, South Korea
Abstract :
The existing works on automatic detection and/or classification of clusters of defective dies on wafers is reviewed. The literature is classified into three major categories, namely, spatial randomness test, automatic cluster detection only, and automatic detection and classification of clusters. Future research directions are also discussed.
Keywords :
automatic optical inspection; dies (machine tools); image classification; pattern clustering; production engineering computing; semiconductor industry; semiconductor technology; statistical testing; automatic classification; automatic cluster detection; automatic detection; bibliographical review; defective die clusters; defective pattern analysis; semiconductor manufacturing; spatial randomness test; wafers; Clustering algorithms; Decision trees; Manufacturing; Neural networks; Pattern recognition; Semiconductor device modeling; Systematics;
Conference_Titel :
Automation Science and Engineering (CASE), 2012 IEEE International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4673-0429-0
DOI :
10.1109/CoASE.2012.6386471
