Title :
Isotopically Engineered Silicon Nanoelectronics
Author_Institution :
Keio Univ., Yokohama
Abstract :
Isotope engineering of silicon has been employed towards development of silicon-based quantum computers and complete modeling of nano-CMOS fabrication processes towards development of next-generation technology computer aided design (TCAD) systems.
Keywords :
isotopes; nanoelectronics; quantum computing; semiconductor process modelling; silicon; technology CAD (electronics); Si; TCAD; isotope engineering; nanoCMOS fabrication processes; silicon nanoelectronics; silicon-based quantum computers; technology computer aided design systems; Chemical elements; Clocks; Electrons; Error correction; Isotopes; Moore´s Law; Nanoelectronics; Physics computing; Quantum computing; Silicon;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418931
