DocumentCode
2603092
Title
Isotopically Engineered Silicon Nanoelectronics
Author
Itoh, Kohei M.
Author_Institution
Keio Univ., Yokohama
fYear
2007
fDate
10-12 Dec. 2007
Firstpage
303
Lastpage
306
Abstract
Isotope engineering of silicon has been employed towards development of silicon-based quantum computers and complete modeling of nano-CMOS fabrication processes towards development of next-generation technology computer aided design (TCAD) systems.
Keywords
isotopes; nanoelectronics; quantum computing; semiconductor process modelling; silicon; technology CAD (electronics); Si; TCAD; isotope engineering; nanoCMOS fabrication processes; silicon nanoelectronics; silicon-based quantum computers; technology computer aided design systems; Chemical elements; Clocks; Electrons; Error correction; Isotopes; Moore´s Law; Nanoelectronics; Physics computing; Quantum computing; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location
Washington, DC
Print_ISBN
978-1-4244-1507-6
Electronic_ISBN
978-1-4244-1508-3
Type
conf
DOI
10.1109/IEDM.2007.4418931
Filename
4418931
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