DocumentCode
2603257
Title
Reliability of Molybdenum Thin Films in Humid Atmospheres
Author
Hornung, A.
Author_Institution
IBM Components Division, East Fishkill Facility, Hopewell Junction, New York 12533
fYear
1972
fDate
26390
Firstpage
149
Lastpage
154
Abstract
The effect of temperature and relative humidity on the corrosion rate of molybdenum thin films are discussed. The subject of acceleration factors and critical relative humidity for devices using this film is also addressed. A model is presented to explain the observed results.
Keywords
Acceleration; Atmosphere; Corrosion; Electric variables measurement; Electrical resistance measurement; Humidity; Scanning electron microscopy; Temperature; Testing; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1972. 10th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1972.362543
Filename
4207915
Link To Document