• DocumentCode
    2603289
  • Title

    A Statistical Model for Electromigration Induced Failure in Thin Film Conductors

  • Author

    Venables, John D. ; Lye, Robert G.

  • Author_Institution
    Research Institute for Advanced Studies, Martin Marietta Corporation, Baltimore, Maryland 21Z27
  • fYear
    1972
  • fDate
    26390
  • Firstpage
    159
  • Lastpage
    164
  • Abstract
    A statistical model has been developed that relates the electromigration-induced failure rates of metallized conductors to the physical processes that cause such failures. The analytical formulation of this model suggests: i) a resolution of the controversy regarding the relationship between mean times-to-failure and the current density, ii) a potentially more useful statistical analysis for failure rates, and, iii) the possibility that electro-migration failure rates and their statistics may be computed after making only a few simple measurements to characterize the system.
  • Keywords
    Conductive films; Conductors; Current density; Current measurement; Density measurement; Electromigration; Failure analysis; Metallization; Statistical analysis; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1972. 10th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1972.362545
  • Filename
    4207917