Title :
Future challenges for mems failure analysis
Author :
Walraven, Jeremy A.
Author_Institution :
Sandia National Laboratories
fDate :
Sept. 30-Oct. 2, 2003
Keywords :
Biomedical optical imaging; Fabrication; Failure analysis; Microfluidics; Micromechanical devices; Optical devices; Optical filters; Optical sensors; Optical switches; Testing;
Conference_Titel :
Test Conference, 2003. Proceedings. ITC 2003. International
Print_ISBN :
0-7803-8106-8
DOI :
10.1109/TEST.2003.1271070
