Title :
Micro-Engineered Devices for Motion Energy Harvesting
Author :
Yeatman, Eric M. ; Mitcheson, Paul D. ; Holmes, Andrew S.
Author_Institution :
Imperial Coll. London, London
Abstract :
MEMS (micro-electro-mechanical systems) is being widely investigated for use in harvesting energy from motion, e.g. human body movement or machine vibration. MEMS harvesters are of interest for powering small electronic devices, particularly wireless sensor nodes. This paper summarises the general structures of these energy harvesters and their achievable power levels, and compares the different transduction mechanisms used. Some new device concepts are introduced, and likely future developments are discussed.
Keywords :
micromechanical devices; MEMS; electronic devices; microelectro-mechanical systems; motion energy harvesting; transduction mechanism; Batteries; Cost function; Damping; Microelectromechanical systems; Micromachining; Micromechanical devices; Power engineering and energy; Silicon; Springs; Wireless sensor networks;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418950
