Title :
Quantum, Power, and Compound Semiconductors - Reliability and Characterization Of Power HEMTs
Author :
Kizilyalli, Isik C. ; Chen, Kevin J.
Author_Institution :
Nitronex Corpotation
Keywords :
Aluminum gallium nitride; Degradation; Failure analysis; Gallium nitride; HEMTs; MODFETs; Plasma immersion ion implantation; Plasma sources; Semiconductor device reliability; Substrates;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418951