DocumentCode :
2603538
Title :
A single-ended CMOS sensing circuit for MEMS gyroscope with noise cancellation
Author :
Elsayed, Mohannad ; Emira, Ahmed ; Sedky, Sherif ; Habib, S.E.-D.
Author_Institution :
Fac. of Eng., Cairo Univ., Cairo, Egypt
fYear :
2010
fDate :
20-23 June 2010
Firstpage :
385
Lastpage :
388
Abstract :
In this work, a complete single-ended readout circuit for capacitive MEMS gyroscope using chopper stabilization technique is presented. A novel noise cancellation technique is used to get rid of the bias noise. The circuit offers superior performance over state of the art readout circuits in terms of cost, gain, and noise for the given area and power consumption. The full circuit exhibits a gain of 58dB, a power dissipation of 1.3mW and an input referred noise of 12nV/√Hz. This would significantly improve the overall sensitivity of the gyroscope. The full circuit has been fabricated in 0.6μm CMOS technology and it occupies an area of 0.4mm × 1mm.
Keywords :
CMOS integrated circuits; capacitive sensors; choppers (circuits); gyroscopes; interference suppression; microsensors; CMOS sensing circuit; MEMS; capacitive sensor; chopper stabilization technique; gain 58 dB; gyroscope; noise cancellation technique; power 1.3 mW; size 0.6 mum; CMOS integrated circuits; Capacitance; Gyroscopes; Micromechanical devices; Mixers; Noise; Sensors; Gyroscope; MEMS; capacitive sensing; chopper stabilization; interface circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
NEWCAS Conference (NEWCAS), 2010 8th IEEE International
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4244-6806-5
Electronic_ISBN :
978-1-4244-6804-1
Type :
conf
DOI :
10.1109/NEWCAS.2010.5603997
Filename :
5603997
Link To Document :
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