Title :
MEMS Variable Capacitor Actuated with an Electrically Floating Plate
Author :
Yoon, Young Jun ; Lee, Hyung Suk ; Yoon, Jun-Bo
Author_Institution :
Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon
Abstract :
A MEMS variable capacitor with a new actuation principle was proposed and demonstrated. It utilizes electrostatic actuation of an electrically floating plate, which is advantageous in terms of Q-factor by eliminating spring resistance in an RF signal path. We achieved a tuning ratio of 41% with the control voltage of 5.5 V and a measured Q of 26.7 at 5 GHz (C=0.37 pF), which showed 131% increment of the Q from the conventional tunable-gap capacitor.
Keywords :
Q-factor; capacitors; electrostatic actuators; microwave devices; MEMS variable capacitor; Q-factor; RF signal; electrically floating plate; electrostatic actuation; frequency 5 GHz; spring resistance; voltage 5.5 V; Capacitors; Electric resistance; Electric variables control; Electrical resistance measurement; Electrostatic actuators; Electrostatic measurements; Micromechanical devices; Q factor; Springs; Voltage control;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418965
