Title :
Room temperature microchannel fabrication for microfluidic system
Author :
Yao, Da-Jeng ; Chen, Po-Yu
Author_Institution :
Inst. of MicroElectroMechanical Syst., Nat. Tsing Hua Univ., Hsinchu
Abstract :
This paper reports a novel method to fabricate micro structures under room temperature, which could be used in microfluidic system. This micro fluidic system can be used to automatically transport liquid by evaporation at the end without any external driving force. Because the micro fluidic system chip was easy to be fabricated, and it didn´t need dynamic temperature control system and driving pump, the cost of whole system would be cheap. Moreover, silicon dioxide is easy to integrate with other system by semiconductor technology. Therefore, it is a high economic technology to be applied on commercial products.
Keywords :
evaporation; microchannel flow; silicon compounds; evaporation; liquid; micro fluidic system chip; microchannel fabrication; room temperature; temperature 293 K to 298 K; Biological materials; Biomedical optical imaging; Fabrication; Glass; Microchannel; Microfluidics; Optical materials; Optical polymers; Silicon compounds; Temperature; evaporating force; microchannel; microfluidic system; silicon dioxide;
Conference_Titel :
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-0607-4
Electronic_ISBN :
978-1-4244-0608-1
DOI :
10.1109/NANO.2007.4601153
