• DocumentCode
    2603703
  • Title

    Integrated Circuits & Manufacturing - Nonvolatile Memories

  • Author

    Prall, Kirk ; Specth, Michael

  • Author_Institution
    Micron Technology
  • fYear
    2007
  • fDate
    10-12 Dec. 2007
  • Firstpage
    443
  • Lastpage
    443
  • Keywords
    High-K gate dielectrics; Hot carriers; Integrated circuit manufacture; Integrated circuit technology; Kirk field collapse effect; Metallization; Nonvolatile memory; Phase change memory; Silicon; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2007. IEDM 2007. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    978-1-4244-1507-6
  • Electronic_ISBN
    978-1-4244-1508-3
  • Type

    conf

  • DOI
    10.1109/IEDM.2007.4418968
  • Filename
    4418968