Title :
Integrated Circuits & Manufacturing - Nonvolatile Memories
Author :
Prall, Kirk ; Specth, Michael
Author_Institution :
Micron Technology
Keywords :
High-K gate dielectrics; Hot carriers; Integrated circuit manufacture; Integrated circuit technology; Kirk field collapse effect; Metallization; Nonvolatile memory; Phase change memory; Silicon; Voltage;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418968