DocumentCode
2603703
Title
Integrated Circuits & Manufacturing - Nonvolatile Memories
Author
Prall, Kirk ; Specth, Michael
Author_Institution
Micron Technology
fYear
2007
fDate
10-12 Dec. 2007
Firstpage
443
Lastpage
443
Keywords
High-K gate dielectrics; Hot carriers; Integrated circuit manufacture; Integrated circuit technology; Kirk field collapse effect; Metallization; Nonvolatile memory; Phase change memory; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location
Washington, DC
Print_ISBN
978-1-4244-1507-6
Electronic_ISBN
978-1-4244-1508-3
Type
conf
DOI
10.1109/IEDM.2007.4418968
Filename
4418968
Link To Document