DocumentCode :
2603703
Title :
Integrated Circuits & Manufacturing - Nonvolatile Memories
Author :
Prall, Kirk ; Specth, Michael
Author_Institution :
Micron Technology
fYear :
2007
fDate :
10-12 Dec. 2007
Firstpage :
443
Lastpage :
443
Keywords :
High-K gate dielectrics; Hot carriers; Integrated circuit manufacture; Integrated circuit technology; Kirk field collapse effect; Metallization; Nonvolatile memory; Phase change memory; Silicon; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
Type :
conf
DOI :
10.1109/IEDM.2007.4418968
Filename :
4418968
Link To Document :
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