Title :
Failure Analysis of Oxide Defects
Author :
Ebel, G.H. ; Engelke, H.A.
Author_Institution :
Singer Kearfott Division, 150 Totowa Road, Wayne, N.J.
Abstract :
There have been many good papers presented on various failure analysis techniques for studying oxide defects. This paper will review some of these and will describe, in detail, the application of nematic liquid crystals to the problem of locating pinholes in oxide layers. Methods of isolating the defective area will also be covered. Some problems caused by the use off deposited oxide scratch coating and a method of removing these coatings without removing the underlying metalization are also discussed.
Keywords :
Aluminum; Circuit faults; Coatings; Electron beams; Failure analysis; Large scale integration; Liquid crystals; Probes; Process control; Resists;
Conference_Titel :
Reliability Physics Symposium, 1973. 11th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1973.362580
