DocumentCode
2604001
Title
CMOS & Interconnect Reliability - Advanced Dielectric Reliability
Author
Pey, Kin Leong ; Furusawa, Takeshi
Author_Institution
Nanyang Tech University
fYear
2007
fDate
10-12 Dec. 2007
Firstpage
491
Lastpage
491
Keywords
Copper; Dielectric breakdown; Electric breakdown; Encapsulation; Paper technology; Technology management;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location
Washington, DC
Print_ISBN
978-1-4244-1507-6
Electronic_ISBN
978-1-4244-1508-3
Type
conf
DOI
10.1109/IEDM.2007.4418981
Filename
4418981
Link To Document