Failure Analysis Applications of the Scanning Electron Microscope

The basic operation, advantages, and limitations of the scanning electron microscope are discussed. In applications the high magnification and large depth of field capabilities of the SEM are shown to aid in evaluating surface features such as metallization and wire bonds. Examples of both dynamic and static voltage contrast displays illustrate the localization of defects in integrated circuits. The electron beam induced current mode is used to detect sub-surface defects in discrete devices.