DocumentCode
2604114
Title
Failure Analysis using the Electron Microprobe
Author
Colby, J.W.
Author_Institution
Bell Laboratories, 555 Union Boulevard, Allentown, Pa. 18103
fYear
1973
fDate
26755
Firstpage
189
Lastpage
193
Abstract
The electron microprobe is an extremely useful diagnostic tool. It is capable of performing both qualitative and quantitative analysis, and may also provide information on chemical valence state. The analyses are rapid and nondestructive, and may be obtained on an extremely local scale, typically 1-2 cubic microns.
Keywords
Chemical analysis; EMP radiation effects; Electron beams; Energy resolution; Failure analysis; Optical microscopy; Photonic crystals; Scanning electron microscopy; X-ray detection; X-ray detectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1973. 11th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1973.362594
Filename
4207969
Link To Document